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Journal of the Korean Institute of Electromagnetic and Science 2002;2(1):34-38.
Air-Gap Type TFBAR Ladder Filters for Wireless Applications
Kun-Wook Kim1, Myeong-Gweon Goo2, Jong-Gwan Yook1, Han-Kyu Park1
1Department of Electrical and Electronic Engineering, Yonsei University
2MEMS solutions Inc.
Abstract
TFBAR filters for wireless applications are simulated and fabricated. A CAD model is used to analize the air-gap type single resonator and MBVD model is used far filter design. Aluminum nitride is used as the piezoelectric material with platinum electrodes. To verier the CAD model, simulated and measured results are compared far various top electrode thicknesses, and the agreement is within 0.5 % for the parallel resonance frequency. Various types of the ladder type band pass filters are predicted and their responses are compared with measured frequency data.
Key words: TFBAR, CAD model, MBVD model, ladder filter.

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